New and Refurbished Electrostatic Chuck Services
Creative Technology provides new manufacturing and refurbishment services for various Electrostatic Chucks (ESC / E-Chuck).
We specialize in electrostatic chucks used in semiconductor equipment, covering 6”, 8”, and 12” sizes. Our products include materials such as Polyimide (PI), anodized surfaces, and ceramic thermal spray coatings, all of which we manufacture and refurbish.
Below is a list of the product models and services we offer. We also provide customized solutions to meet specific requirements. If you have any questions or needs, please feel free to contact us.
150mm (6”) New and Refurbishment Services
0010-10982
150mm AMAT MXP+ ESC
0010-10529 / 0040-09963
150mm MxP Poly
0010-10204
150mm Centura ESC
0090-35135
150mm DPS ESC
718-094756-061
150mm Lam 9600 ESC
718-092326-066
150mm Lam 4720 ESC
200mm (8”) New and Refurbishment Services
0010-10982
200mm AMAT MXP+ ESC / STI Nitride ESC
0010-10982
0040-77771/0090-35133 200mm AMAT DPS ESC
0010-10982
200mm AMAT E-Max ESC
0040-18219 / 0041-78449 / 0040-18053
200mm AMAT HDP ESC
0090-09298
200mm AMAT MXP GEN 2 ESC
0010-10528 / 0041-37391
200mm AMAT STI MXP Poly ESC - New
0010-05966 / 0040-39990 / 0010-39835
200mm AMAT Super E ESC
718-094523-281 / 718-094523-218
200mm LAM9400 ESC
ES1D10-202204-12 / ES1D10-250233-11
Electrode Upper P-1 (DRM2)
1885-023137-17
200mm TEL 85DP ESC - New
ES1D10-100956-12
200mm TEL 85DD (PI) ESC - New
ES1D85-006978-15 / ES1D85-006978-13
200mm TEL 85DD (Ce) ESC - New
ES1810-225123-11
TEL SCCM Focus Si Ring
839-440462-508
200mm Lam Exelan ESC
3FB0229G-4
200mm Shibaura CDE ESC
02-1302-134263-00 / 02-257120-00
200mm Novellus HDP ESC
ES1D85-006978-13
200mm TEL 85DD (Ce) ESC
300mm (12”) New and Refurbishment Services
839-019090-608
300mm LAM 608
839-019090-611
300mm LAM 611
839-019090-374
300mm LAM 374
839-019090-577
300mm LAM 577
3D10-150110-11
300mm TEL Long life ESC
3D10-101227-11
300mm TEL SCCM BSP ESC
3D10-100930-13
300mm TEL SCCM SE+ ESC
3D10-100123-16 / 3D87-002338-14
300mm TEL DRM ESC
3D10-100810-12 / 3D10-100433-12
300mm TEL SCCM SE ESC
ES2L10-151441-11
300mm TEL Vigus ATCC ESC
2L10-150993-11
300mm TEL Vigus NX ESC
0010-11216
300mm AMAT E-Max ESC
0040-48594
300mm AMAT HDP ESC
3FB0229G05
300mm SHIBAURA CDE ESC
2-A10839-*A/2-F03446-*A
Hitachi AQTC ESC
AIBT ESC
2L10-152778-12
TEL Heater Ring
Transparent Electrostatic Chuck (E-Chuck / ESC)
For inspection equipment and bonding alignment applications.
Key Product Features
① Fully Transparent Materials
The base substrate, electrodes, and adsorption surface are all made from transparent materials, forming a fully transparent Electrostatic Chuck (ESC).
② Ideal for Inspection and Bonding Processes
Suitable for backlight inspection and comprehensive visual inspections. In bonding equipment, the alignment marks on the transparent ESC help improve process yield across various production stages.
③ Customizable Design
Like standard electrostatic chucks, the design can be customized according to application requirements, including shape, size, thickness, and the type of object being handled.
Need Technical Advice or Product Information?
Reach out to our specialists for detailed specifications, consultation, and engineering support.