Electrostatic Particle Collector
“Particle” refers to dust, particles, and other microscopic contaminants. Our Particle Collector is developed to reduce particle residue and improve product yield.
Particle conditions can significantly affect a product’s appearance quality, performance, and lifespan. As product quality requirements continue to rise, more customers are seeking effective solutions to control and reduce particle contamination.
In the semiconductor industry, the demand for smaller, higher-performance devices—such as personal computers, tablets, and smartphones—has driven the need for smaller circuit structures and higher manufacturing precision. As circuit dimensions shrink, even micron-level (µm) particles, which were once considered negligible, have become a major challenge in recent years.
Beyond semiconductors, many manufacturing sectors are also focusing on improving yield, enhancing production efficiency, and reducing particle contamination, especially as factory automation continues to advance.
Our Electrostatic Particle Collector applies the electrostatic chuck technology we have developed over many years in the semiconductor industry to capture airborne particles and dust, effectively improving particle control. Today, many companies across various industries have begun adopting our Particle Collector as part of their particle contamination control strategy.
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